Multi-mode interference coupler

ABSTRACT

An optimized SOI 2×2 multimode interference (MMI) coupler is designed by use of the particle swarm optimization (PSO) algorithm. Finite Difference Time Domain (FDTD) simulation shows that, within a footprint of 9.4×1.6 μm 2 , &lt;0.1 dB power unbalance and &lt;1 degree phase error are achieved across the entire C-band. The excess loss of the device is &lt;0.2 dB.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.15/379,695, filed Dec. 15, 2016, now allowed, which is a continuation ofU.S. patent application Ser. No. 14/754,306, filed Jun. 29, 2015, nowU.S. Pat. No. 9,557,486, each of which is hereby incorporated byreference herein in its entirety.

FIELD OF THE INVENTION

The invention relates to optical couplers in general and particularly toa multimode interference coupler.

BACKGROUND OF THE INVENTION

A 2×2 3 dB multimode interference (MMI) coupler is a fundamentalbuilding block in photonic integrated circuits (PIC). It behaves as a 3dB power splitter such as a y-junction. It also provides 90-degree phasedifference between the two output ports, which is an attractive featurein many applications such as switches and coherent communications. Thebroadband wavelength response also makes it a better candidate fordirectional couplers (DC) when it comes to 3 dB power coupling. The mainchallenge to replace a 3 dB directional coupler is matching or improvingon the insertion loss and phase error. A small footprint is also verydesirable for large-scale photonic integration.

There is a need for improved multimode interference couplers.

SUMMARY OF THE INVENTION

According to one aspect, the invention features a 2×2 multi-modeinterference coupler, comprising: a multi-mode interference regionhaving a length L_(MMI) and having a plurality of segments having widthsW₁, . . . , W_(N), . . . , W₁, where N in an integer greater than one,with at least two of the widths W₁, . . . , W_(N) being different onefrom the other, the widths varying in a symmetric pattern relative tothe central distance L_(MMI)/2 along the length; and four ports p1, p2,p3 and p4, two of the ports in optical communication with the multi-modeinterference region at a first end thereof and spaced apart by adistance D_(gap) and the other two of the ports in optical communicationwith the multi-mode interference region at a second end thereof, atleast one of the four ports configured as an input port and two othersof the four ports configured as output ports.

In one embodiment, the each of the two of the ports in opticalcommunication with the multi-mode interference region at first endthereof is connected to the multi-mode interference region by a taperconnector having a length L_(taper).

In another embodiment, the length L_(taper) is tuned to reduce opticalloss.

In yet another embodiment, the 2×2 multi-mode interference coupler isconfigured to be operable in a wavelength in a band selected from an Oband, an E band, an S band, a C band, an L band, and a U band.

In a further embodiment, a plurality of the 2×2 multi-mode interferencecouplers are cascaded with one of the two of the four ports configuredas output ports of a first of the plurality of the 2×2 multi-modeinterference couplers is connected in serial connection with one of theat least one of the four ports configured as an input port of a secondof the plurality of the 2×2 multi-mode interference couplers.

According to a further aspect, the invention provides an N×M multi-modeinterference coupler, comprising: a multi-mode interference regionhaving a length L_(MMI) and having a plurality of segments having widthsW₁, . . . , W_(N), . . . , W₁, where N in an integer greater than one,with at least two of the widths W₁, . . . , W_(N) being different onefrom the other, the widths varying in a symmetric pattern relative tothe central distance L_(MMI)/2 along the length; and N×M ports, N of theports in optical communication with the multi-mode interference regionat a first end thereof and spaced apart by a distance Dgap and the otherM of the ports in optical communication with the multi-mode interferenceregion at a second end thereof, at least one of the N×M ports configuredas an input port and two or more of the N×M ports configured as outputports, where N and M are positive integers each greater than zero.

According to another aspect, the invention relates to a method of makinga 2×2 multi-mode interference coupler. The method comprises the stepsof: providing a multi-mode interference region having a length L_(MMI)and having a plurality of segments having widths W₁, . . . , W_(N), . .. , W₁, where N in an integer greater than one, with at least two of thewidths W₁, . . . , W_(N) being different one from the other, the widthsvarying in a symmetric pattern relative to the central distanceL_(MMI)/2 along the length; and providing four ports p1, p2, p3 and p4,two of the ports in optical communication with the multi-modeinterference region at a first end thereof and spaced apart by adistance D_(gap) and the other two of the ports in optical communicationwith the multi-mode interference region at a second end thereof, atleast one of the four ports configured as an input port and two othersof the four ports configured as output ports; the widths W₁, . . . ,W_(N) calculated by application of the particle swarm optimizationalgorithm.

In one embodiment, the method further comprises the step of providing ataper connector having a length L_(taper) to connect each of the two ofthe ports to the first end of the multi-mode interference region.

In another embodiment, the 2×2 multi-mode interference coupler isconfigured to be operable in a wavelength selected from the wavelengthsa band selected from an O band, an E band, an S band, a C band, an Lband, and a U band.

According to another aspect, the invention relates to a method of usinga 2×2 multi-mode interference coupler. The method comprises the stepsof: providing a multi-mode interference region having a length L_(MMI)and having a plurality of segments having widths W₁, . . . , W_(N), . .. , W₁, where N in an integer greater than one, with at least two of thewidths W₁, . . . , W_(N) being different one from the other, the widthsvarying in a symmetric pattern relative to the central distanceL_(MMI)/2 along the length; and providing four ports p1, p2, p3 and p4,two of the ports in optical communication with the multi-modeinterference region at a first end thereof and spaced apart by adistance D_(gap) and the other two of the ports in optical communicationwith the multi-mode interference region at a second end thereof, atleast one of the four ports configured as an input port and two othersof the four ports configured as output ports; the widths W₁, . . . ,W_(N) calculated by application of the particle swarm optimizationalgorithm; applying an input optical signal to one of the four portsconfigured as an input port; and recovering two optical output signals,one each at each of the two others of the four ports configured asoutput ports, at least one of the two optical output signals differingfrom the input optical signal at least one of a mode and a phase.

In one embodiment, the 2×2 multi-mode interference coupler is configuredto be operable in a wavelength in a band selected from an O band, an Eband, an S band, a C band, an L band, and a U band.

The foregoing and other objects, aspects, features, and advantages ofthe invention will become more apparent from the following descriptionand from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The objects and features of the invention can be better understood withreference to the drawings described below, and the claims. The drawingsare not necessarily to scale, emphasis instead generally being placedupon illustrating the principles of the invention. In the drawings, likenumerals are used to indicate like parts throughout the various views.

FIG. 1 is a schematic diagram of a prior art MMI coupler.

FIG. 2 is a schematic of one embodiment of an improved MMI couplerconstructed and operated according to principles of the invention.

FIG. 3 is a graph of the finite difference time domain simulatedelectrical field propagation in a device of FIG. 2.

FIG. 4 is a graph showing an insertion loss simulation for a device ofFIG. 2.

FIG. 5 is a graph showing a phase error simulation for a device of FIG.2.

FIG. 6 is a graph showing the experimental data for the loss vs. thenumber of cascaded devices, and a curve fit to the data.

FIG. 7 is a schematic diagram of a test structure comprising a MachZehnder interferometer used as a phase tuner to drive a MMI coupler.

FIG. 8 is a graph of the optical power in each of a top arm and a bottomarm as a function of phase tuning power.

FIG. 9 is a schematic diagram in which a first 2×2 multi-modeinterference coupler is cascaded with a second 2×2 multi-modeinterference coupler 200.

DETAILED DESCRIPTION Acronyms

A list of acronyms and their usual meanings in the present document(unless otherwise explicitly stated to denote a different thing) arepresented below.

AMR Adabatic Micro-Ring

APD Avalanche Photodetector

ARM Anti-Reflection Microstructure

ASE Amplified Spontaneous Emission

BER Bit Error Rate

BOX Buried Oxide

CMOS Complementary Metal-Oxide-Semiconductor

CMP Chemical-Mechanical Planarization

DBR Distributed Bragg Reflector

DC (optics) Directional Coupler

DC (electronics) Direct Current

DCA Digital Communication Analyzer

DRC Design Rule Checking

DSP Digital Signal Processor

DUT Device Under Test

ECL External Cavity Laser

E/O Electro-optical

FDTD Finite Difference Time Domain

FFE Feed-Forward Equalization

FOM Figure of Merit

FSR Free Spectral Range

FWHM Full Width at Half Maximum

GaAs Gallium Arsenide

InP Indium Phosphide

LiNO₃ Lithium Niobate

LIV Light intensity (L)-Current (I)-Voltage (V)

MFD Mode Field Diameter

MMI Multi Mode Interference

MPW Multi Project Wafer

NRZ Non-Return to Zero

OOK On-Off Keying

PIC Photonic Integrated Circuits

PRBS Pseudo Random Bit Sequence

PDFA Praseodymium-Doped-Fiber-Amplifier

PSO Particle Swarm Optimization

Q Quality factor

$Q = {{2\pi \times \frac{{Energy}\mspace{14mu}{Stored}}{{Energy}\mspace{14mu}{dissipated}\mspace{14mu}{per}\mspace{14mu}{cycle}}} = {2\pi\; f_{r} \times {\frac{{Energy}\mspace{14mu}{Stored}}{{Power}\mspace{14mu}{Loss}}.}}}$

QD Quantum Dot

RSOA Reflective Semiconductor Optical Amplifier

SOI Silicon on Insulator

SEM Scanning Electron Microscope

SMSR Single-Mode Suppression Ratio

TEC Thermal Electric Cooler

WDM Wavelength Division Multiplexing

An optimized Silicon-On-Insulator 2×2 MMI (multimode interference)coupler useful in manipulating optical signals is designed by particleswarm optimization (PSO) algorithm. FDTD simulation shows that, within afootprint of 9.4×1.6 μm², <0.1 dB power unbalance and <1 degree phaseerror are achieved across the entire C-band. The excess loss of thedevice is <0.2 dB.

FIG. 1 is a schematic diagram of a prior art MMI coupler. The operatingprinciple is defined by self-imaging theory. The prior art MMI couplerhas four ports, P1 102, P2 104, P3 106 and P4 108. A waveguide modeoptical signal is launched at one of these four ports (P1 in the case ofFIG. 1), propagates in a rectangular piece of multimode region, and thentwo imaging mode optical signals with 90-degree phase difference emergeat the output ports (P2 and P4 in FIG. 1). The vertical port locationsare fixed at ±¼ W_(MMI) as required by self-imaging theory. In theconventional prior art practice, one tunes the width (W_(MMI) 110) andlength (L_(MMI) 112) when designing a 3 dB MMI coupler.

As can be seen, there is not much design freedom for a typicalrectangular shaped 2×2 MMI. A self-imaging point can be readily found bytuning W_(MMI) and L_(MMI). However, to couple light out of themultimode region to a waveguide introduces excess loss. In addition, thegeometry and symmetry property of the MMI will be altered duringfabrication as a result of variations in processing such as may becaused by variations from run to run or even from wafer to wafer inlithography, etching, wafer thickness variation, and the like, affectingthe power balance and the phase error. Simply changing the dimensionsW_(MMI) and L_(MMI) of the device does not produce useful results.

We describe an MMI that is designed using an optimization algorithm.Some features of this device are now enumerated. The geometry of themultimode region is no longer a rectangle but is optimized byapplication of the particle swarm optimization (PSO) algorithm. Shorttapers are introduced between the multimode region and input/outputwaveguides to better guiding the optical mode. A few-mode region ischosen to enhance the optical field coupling and shrink devicefootprint, which is different from the typical prior art MMI coupler inwhich the multimode region supports a large number of optical modes.

FIG. 2 is a schematic of one embodiment of an improved MMI couplerconstructed and operated according to principles of the invention.

In FIG. 2, the width of the MMI coupler is digitized into severalsegments (8 segments in the embodiment illustrated in FIG. 2),identified by a width parameter Wi, where i is a positive integer. InFIG. 2 the widths are given as {W1, W2, W3, W4, W5, W4, W3, W2, W1}. Inthe embodiment illustrated in FIG. 2, the widths are taken at equallyspaced locations along the length L_(MMI). In other embodiments, thewidths can be determined at locations that are not equally spaced alongthe length L_(MMI). By defining the width parameter group, the geometricsymmetry of the MMI coupler is maintained. Because of the geometricsymmetry, the MMI coupler will work the same way in either direction.The input/output guiding tapers connect to the very edge of themultimode region to smoothly transform the input/output mode profiles. Agap 210 having a dimension Dgap is predefined between the top and thebottom waveguides, so that they are spaced apart by that distance.During optimization, L_(MMI) is fixed. After the optimized MMI geometryhas been obtained, one can tune or modify the length L_(taper) tofurther reduce optical loss.

A design figure of merit (FOM) was set to be the total output powerminus the unbalance of (or absolute difference between) the power of twooutput branches, as given by the following equation, in which the poweris measured at ports p3 and p4, as shown in FIG. 2:FOM=Power(p3)+Power(p4)−abs(Power(p3)−Power(p4)).

The SOI thickness during simulation is set at 220 nm. By choosing theparameters Dgap=0.2 μm, W_taper_wide=0.7 μm, W_taper_narrow=0.5 μm andL_(MMI)=8 μm, PSO converges with a FOM=0.985. The width parameters forthe embodiment shown in FIG. 2 are presented in Table 1.

TABLE 1 W₁ W₂ W₃ W₄ W₅ Width (μm) 1.6 1.587 1.45 1.5 1.439 Distance from0 1 2 3 4 edge of MMI (μm)

FIG. 3 is a graph of the finite difference time domain simulatedelectrical field propagation in a device of FIG. 2. As is clearly seen,the amplitude of the E-field is evenly distributed at the right sidewith minimal scattering loss.

FIG. 4 is a graph showing an insertion loss simulation for a device ofFIG. 2. The detailed wavelength dependent performance of each outputbranch is shown in FIG. 4. Curve 410 is the curve for signal input atport p2 and signal output at port p3, while curve 420 is that for signalinput at port p2 and signal output at port p4. Similar behavior would beexpected for signal input at port p1 in place of port p2. Overall, theaverage excess loss in either branch is about 0.07 dB with a worst caseof 0.13 dB and best case of 0.04 dB. These two branches are very wellbalanced, with <0.1 dB difference. The device also provides ultrabroadband performance, with <0.1 dB variation across the C-band.

FIG. 5 is a graph showing a phase error simulation for a device of FIG.2. As shown in FIG. 5, the phase difference is almost perfectly matchedto 90-degree, within an error of 0.6 degree across C-band. The 2×2 MMIdescribed is expected to provide high performance in loss and powerbalance, with a phase error that is very small.

Experimental Results

Insertion loss can be measured by cascading the devices. By cascadingthe devices with different numbers, one can accurately extract theinsertion loss of the device. One application of such cascadedstructures is to provide a test structure in the spare space of a largesystem to enable device characterizations in wafer scale fabrication.

FIG. 6 is a graph showing the experimental data for the loss indelivered power vs. the number of cascaded devices, and a curve fit tothe data. The measured loss per device is about 0.11 dB at a wavelengtharound 1550 nm.

FIG. 7 is a schematic diagram of a test structure comprising a MachZehnder interferometer 710 used as a phase tuner to drive a MMI coupler720. Imbalance and phase error can be measured by the MZI structureshown in FIG. 7. The imbalance can be measured by the extinction ratioof the MZI spectrum.

FIG. 8 is a graph of the optical power in each of a top arm and a bottomarm as a function of phase tuning power. As shown in FIG. 8, theextinction ratio is about 45 dB for both output arms, indicatingimbalance of about 0.1 dB. By comparing the phases of bottom arm and toparm, the phase error is measured to be within 1 degree.

It is believed that apparatus constructed using principles of theinvention and methods that operate according to principles of theinvention can be used in the wavelength ranges (O band, E band, S band,C band, L band, and U band) described in Table II.

TABLE II Band Description Wavelength Range O band original 1260 to 1360nm E band extended 1360 to 1460 nm S band short wavelengths 1460 to 1530nm C band conventional (“erbium window”) 1530 to 1565 nm L band longwavelengths 1565 to 1625 nm U band ultralong wavelengths 1625 to 1675 nm

FIG. 9 is a schematic diagram in which a first 2×2 multi-modeinterference coupler 200 (2×2 MMI A) is cascaded with a second 2×2multi-mode interference coupler 200 (2×2 MMI A). As shown in FIG. 9output port P4A of 2×2 MMI A is in optical communication with input portP1B of 2×2 MMI B by way of optical carrier 900, which in variousembodiments can be an optical waveguide, or the two 2×2 multi-modeinterference couplers can be close enough that one output is directly inoptical communication with an input of a subsequent coupler. Note thatport P4A can also be directly connected to port P2B (meanwhile P3A isconnected to P1B) to form cascaded MMI structure. As illustrated in FIG.9, any convenient number of couplers can be cascaded, if A=1, B=2, and Nis a positive integer equal to or greater than 3.

It is believed that other coupler, such as to other M×M or N×M MMIcoupler designs such as 3×3 MMI, 4×4 MMI, 2×4 MMI, and so forth can alsobe designed and constructed by direct extension of the methods to designand to fabricate the 2×2 MMI embodiment that has been described herein.

Design and Fabrication

Methods of designing and fabricating devices having elements similar tothose described herein are described in one or more of U.S. Pat. Nos.7,200,308, 7,339,724, 7,424,192, 7,480,434, 7,643,714, 7,760,970,7,894,696, 8,031,985, 8,067,724, 8,098,965, 8,203,115, 8,237,102,8,258,476, 8,270,778, 8,280,211, 8,311,374, 8,340,486, 8,380,016,8,390,922, 8,798,406, and 8,818,141, each of which documents is herebyincorporated by reference herein in its entirety.

Definitions

As used herein, the term “optical communication channel” is intended todenote a single optical channel, such as light that can carryinformation using a specific carrier wavelength in a wavelength divisionmultiplexed (WDM) system.

As used herein, the term “optical carrier” is intended to denote amedium or a structure through which any number of optical signalsincluding WDM signals can propagate, which by way of example can includegases such as air, a void such as a vacuum or extraterrestrial space,and structures such as optical fibers and optical waveguides.

Theoretical Discussion

Although the theoretical description given herein is thought to becorrect, the operation of the devices described and claimed herein doesnot depend upon the accuracy or validity of the theoretical description.That is, later theoretical developments that may explain the observedresults on a basis different from the theory presented herein will notdetract from the inventions described herein.

Any patent, patent application, patent application publication, journalarticle, book, published paper, or other publicly available materialidentified in the specification is hereby incorporated by referenceherein in its entirety. Any material, or portion thereof, that is saidto be incorporated by reference herein, but which conflicts withexisting definitions, statements, or other disclosure materialexplicitly set forth herein is only incorporated to the extent that noconflict arises between that incorporated material and the presentdisclosure material. In the event of a conflict, the conflict is to beresolved in favor of the present disclosure as the preferred disclosure.

While the present invention has been particularly shown and describedwith reference to the preferred mode as illustrated in the drawing, itwill be understood by one skilled in the art that various changes indetail may be affected therein without departing from the spirit andscope of the invention as defined by the claims.

What is claimed is:
 1. An optical coupler, comprising: a multi-moderegion including: a length L between a first end and a second end; and aplurality of segments having widths, at least five of said segmentwidths from the first end to the second end being different one from theother; a plurality of first ports at the first end of the multi-moderegion; and a plurality of second ports at the second end of themulti-mode region; wherein the second and fourth segment widths from thefirst end are greater than the third and fifth widths from the firstend.
 2. The coupler according to claim 1, wherein the multi-mode regioncomprises a few-mode region.
 3. The coupler according to claim 1,wherein said segment widths vary in a symmetric pattern relative to acentral distance L/2 along said length defining a bidirectional coupler.4. The coupler according to claim 1, wherein said segment widths are atequally spaced locations along the length.
 5. The coupler according toclaim 2, wherein the plurality of first ports comprises two ports; andwherein the plurality of second ports comprises two ports.
 6. Thecoupler according to claim 5, wherein said widths range from 1.439 μm to1.6 μm.
 7. The coupler according to claim 5, wherein the few-mode regionand the plurality of first and second ports are within a footprint of9.4×1.6 μm².
 8. The coupler according to claim 5, wherein each of saidports is connected to said few-mode region by a taper connector.
 9. Thecoupler according to claim 2, wherein at least one taper connector isconnected to an edge of the few-mode region to smoothly transforminput/output mode profiles.
 10. A method of manufacturing an opticalcoupler, comprising: a multi-mode region including: a length L between afirst end and a second end; and a plurality of segments having widths,at least five of said segment widths from the first end to the secondend being different one from the other, wherein the second and fourthsegment widths from the first end are greater than the third and fifthwidths from the first end; a plurality of first ports at the first endof the multi-mode region; and a plurality of second ports at the secondend of the multi-mode region; said method comprising: determining eachwidth for the plurality of segments for a predefined set of designparameters, using a computerized optimization algorithm; and fabricatingthe optical coupler with the widths.
 11. The method according to claim10, wherein the multi-mode region comprises a few-mode region.
 12. Themethod according to claim 10, wherein the computerized optimizationalgorithm comprises one of a particle swarm optimization algorithm. 13.The method according to claim 10, wherein said segment widths vary in asymmetric pattern relative to a central distance L/2 along said lengthdefining a bidirectional coupler.
 14. The method according to claim 10,wherein said segment widths are at equally spaced locations along thelength.
 15. The method according to claim 11, wherein the plurality offirst ports comprises two ports; and wherein the plurality of secondports comprises two ports.
 16. The coupler according to claim 15,wherein said widths range from 1.439 μm to 1.6 μm.
 17. The methodaccording to claim 15, wherein the few-mode region and the plurality offirst and second ports are within a footprint of 9.4×1.6 μm².
 18. Themethod according to claim 15, wherein each of said ports is connected tosaid few-mode region by a taper connector to smoothly transforminput/output mode profiles.